JPH01125357U - - Google Patents
Info
- Publication number
- JPH01125357U JPH01125357U JP1954388U JP1954388U JPH01125357U JP H01125357 U JPH01125357 U JP H01125357U JP 1954388 U JP1954388 U JP 1954388U JP 1954388 U JP1954388 U JP 1954388U JP H01125357 U JPH01125357 U JP H01125357U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- sputtering
- gas
- target
- causing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 238000007599 discharging Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 claims 1
- 238000009795 derivation Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1954388U JPH01125357U (en]) | 1988-02-17 | 1988-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1954388U JPH01125357U (en]) | 1988-02-17 | 1988-02-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01125357U true JPH01125357U (en]) | 1989-08-25 |
Family
ID=31235147
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1954388U Pending JPH01125357U (en]) | 1988-02-17 | 1988-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01125357U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163377A (ja) * | 1988-12-18 | 1990-06-22 | Ulvac Corp | 仕込・取出室 |
| JP2001107231A (ja) * | 1999-10-01 | 2001-04-17 | Toppan Printing Co Ltd | スパッタリング成膜装置及びそれを用いたフォトマスクブランクスの製造方法 |
-
1988
- 1988-02-17 JP JP1954388U patent/JPH01125357U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02163377A (ja) * | 1988-12-18 | 1990-06-22 | Ulvac Corp | 仕込・取出室 |
| JP2001107231A (ja) * | 1999-10-01 | 2001-04-17 | Toppan Printing Co Ltd | スパッタリング成膜装置及びそれを用いたフォトマスクブランクスの製造方法 |
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